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Recoil implantation of oxygen from SiO2 thin films on silicon
B. Villepelet, F. Ferrieu, A. Grouillet, A. Golanski, J.P. Gailliard, E. LigeonVolume:
182-183
Year:
1981
Language:
english
Pages:
5
DOI:
10.1016/0029-554x(81)90681-9
File:
PDF, 265 KB
english, 1981