The depth profile of high-dose low-mass ions implanted into...

Nuclear Instruments and Methods in Physics Research 1981 Vol. 191; Iss. 1-3

The depth profile of high-dose low-mass ions implanted into higher mass substrate by RBS analysis

Yin Shi-duan, Zhang Jing-ping, Gu Quan, Liu Shi-jie, Xie Bao-zhan, Ma Tie-liang, Qu Zhen-yuan
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
191
Year:
1981
Language:
english
Pages:
4
DOI:
10.1016/0029-554x(81)90997-6
File:
PDF, 196 KB
english, 1981
Conversion to is in progress
Conversion to is failed