Microstructural and optical properties of ZrON/Si thin...

Materials Letters 2013 / 8 Vol. 105

Microstructural and optical properties of ZrON/Si thin films

Atuchin, V.V., Kruchinin, V.N., Hoong Wong, Yew, Yew Cheong, Kuan
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Volume:
105
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2013.03.100
Date:
August, 2013
File:
PDF, 737 KB
english, 2013
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