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In-situ fabrication and characterization of ordered Ge QDs in Si3N4 matrix without barrier layers by rf-magnetron sputtering
Lee, Sammy, Huang, Shujuan, Conibeer, Gavin, Green, MartinVolume:
290
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.11.026
Date:
January, 2014
File:
PDF, 1.57 MB
english, 2014