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Atomic force microscopy investigation of the effects of annealing on amorphous carbon nitride films deposited by r.f. magnetron sputtering
Prioli, R, Zanette, S.I, Caride, A.O, Lacerda, M.M, Freire, F.LVolume:
8
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(98)00453-1
Date:
June, 1999
File:
PDF, 136 KB
english, 1999