Epitaxial thin film growth, characterization and device development in monocrystalline α- and β-silicon carbide
Davis, Robert F., Palmour, J.W., Edmond, J.A.Volume:
1
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(92)90009-D
Date:
March, 1992
File:
PDF, 2.82 MB
english, 1992