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Effect of thickness and substrate temperature on the properties of transparent Ti-doped In2O3 films grown by direct current magnetron sputtering
Kim, Dong-Ju, Kim, Bong-sueg, Kim, Han-KiVolume:
547
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.02.073
Date:
November, 2013
File:
PDF, 1.17 MB
english, 2013