![](/img/cover-not-exists.png)
The structure and tribological property of amorphous carbon and carbon nitride films prepared by ECR plasma sputtering method
Ohana, T, Goto, A, Yamamoto, K, Nakamura, T, Tanaka, A, Osawa, Y, Yoda, H, Sahashi, M, Koga, YVolume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(00)00586-0
Date:
March, 2001
File:
PDF, 205 KB
english, 2001