Dependence of annealing on stability of transparent...

Materials Science in Semiconductor Processing 2013 / 10 Vol. 16; Iss. 5

Dependence of annealing on stability of transparent amorphous InGaZnO thin film transistor

Li, Xifeng, Xin, Enlong, Chen, Longlong, Shi, Jifeng, Li, Chunya, Zhang, Jianhua
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Volume:
16
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2013.02.013
Date:
October, 2013
File:
PDF, 1.53 MB
english, 2013
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