Antireflective nanostructures fabricated by reactive ion...

Applied Surface Science 2013 / 4 Vol. 271

Antireflective nanostructures fabricated by reactive ion etching method on pyramid-structured silicon surface

Yue, Zhihao, Shen, Honglie, Jiang, Ye
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Volume:
271
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.01.216
Date:
April, 2013
File:
PDF, 1.30 MB
english, 2013
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