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Thin film metallization by magnetron sputtering from highly pure molybdenum targets
Glebovsky, V.G, Markaryans, E.AVolume:
190
Language:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/0925-8388(93)90392-Z
Date:
January, 1993
File:
PDF, 379 KB
english, 1993