Synthesis and characterization of fluorinated amorphous...

Diamond and Related Materials 2005 / 3 Vol. 14; Iss. 3-7

Synthesis and characterization of fluorinated amorphous carbon films by reactive magnetron sputtering

Ishihara, M., Suzuki, M., Watanabe, T., Nakamura, T., Tanaka, A., Koga, Y.
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Volume:
14
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2004.12.019
Date:
March, 2005
File:
PDF, 223 KB
english, 2005
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