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XPS studies on silicon carbonitride films prepared by sequential implantation of nitrogen and carbon into silicon
Deng, Z.-W, Souda, RVolume:
11
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(02)00143-7
Date:
September, 2002
File:
PDF, 203 KB
english, 2002