Mass density control of carbon films deposited by...

Surface and Coatings Technology 2013 / 08 Vol. 228

Mass density control of carbon films deposited by H-assisted plasma CVD method

Urakawa, Tatsuya, Matsuzaki, Hidehumi, Yamashita, Daisuke, Uchida, Giichiro, Koga, Kazunori, Shiratani, Masaharu, Setsuhara, Yuichi, Sekine, Makoto, Hori, Masaru
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Volume:
228
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2012.10.002
Date:
August, 2013
File:
PDF, 735 KB
english, 2013
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