Thermal annealing effect on zinc nitride thin films...

Materials Science in Semiconductor Processing 2013 / 4 Vol. 16; Iss. 2

Thermal annealing effect on zinc nitride thin films deposited by reactive rf-magnetron sputtering process

Wen, Ting, Gautam, Madhav, Soleimanpour, Amir M., Jayatissa, Ahalapitiya H.
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Volume:
16
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2012.10.004
Date:
April, 2013
File:
PDF, 932 KB
english, 2013
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