UV-patternable polymers with selective spectral response

Microelectronic Engineering 2012 / 10 Vol. 98

UV-patternable polymers with selective spectral response

de Pedro, Sandra, Voigt, Anja, Cadarso, Victor J., Vila-Planas, Jordi, Brugger, Juergen, Büttgenbach, Stephanus, Llobera, Andreu, Gruetzner, Gabi
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.013
Date:
October, 2012
File:
PDF, 815 KB
english, 2012
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