Experimental and theoretical investigation of phosphorus in-situ doping of germanium epitaxial layers
Yu, Hyun-Yong, Battal, Enes, Okyay, Ali Kemal, Shim, Jaewoo, Park, Jin-Hong, Baek, Jung Woo, Saraswat, Krishna C.Volume:
13
Language:
english
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2013.02.021
Date:
August, 2013
File:
PDF, 374 KB
english, 2013