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Optical and structural properties of nitrogen doped amorphous carbon films grown by rf plasma-enhanced CVD
Hayashi, Y., Krishna, K.M., Ebisu, H., Soga, T., Umeno, M., Jimbo, T.Volume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(00)00566-5
Date:
March, 2001
File:
PDF, 140 KB
english, 2001