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Improved film deposition of carbon and carbon nitride materials on patterned substrates by ionized magnetron sputtering
ANGLERAUD, BVolume:
180-181
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/S0257-8972(03)01177-0
Date:
March, 2004
File:
PDF, 1.70 MB
english, 2004