Real time measurements of charged gas phase nuclei during the deposition of silicon thin films by hot wire chemical vapor deposition
Hong, Ju-Seop, Kim, Chan-Soo, Yoo, Seung-Wan, Park, Seong-Han, Lee, Sung-Soo, Hwang, Nong-Moon, Choi, Hoo-Mi, Kim, Dong-Bin, Kim, Tae-SungVolume:
13
Language:
english
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2012.12.016
Date:
July, 2013
File:
PDF, 1.46 MB
english, 2013