Studies on the formation of source and drain in low...

Current Applied Physics 2013 / 7 Vol. 13

Studies on the formation of source and drain in low temperature polycrystalline silicon thin film transistors

Lee, Yong Woo, Yang, Gui Fu, Mallikarjuna Reddy, A., Byun, Chang Woo, Son, Se wan, Yun, Seung Jae, Joo, Seung Ki
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Volume:
13
Language:
english
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2012.12.030
Date:
July, 2013
File:
PDF, 756 KB
english, 2013
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