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Significant enhancement in electromigration resistance and texture of aluminum films using an ultrathin titanium underlayer
Liu, Hongyan, Zeng, Fei, Tang, Guangsheng, Wang, Guangyue, Song, Cheng, Pan, FengVolume:
61
Language:
english
Journal:
Acta Materialia
DOI:
10.1016/j.actamat.2013.04.032
Date:
July, 2013
File:
PDF, 1.37 MB
english, 2013