Significant enhancement in electromigration resistance and...

Significant enhancement in electromigration resistance and texture of aluminum films using an ultrathin titanium underlayer

Liu, Hongyan, Zeng, Fei, Tang, Guangsheng, Wang, Guangyue, Song, Cheng, Pan, Feng
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Volume:
61
Language:
english
Journal:
Acta Materialia
DOI:
10.1016/j.actamat.2013.04.032
Date:
July, 2013
File:
PDF, 1.37 MB
english, 2013
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