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Characterization of boron carbon nitride films with a low dielectric constant
Etou, Yoshihiro, Tai, Tomoyoshi, Sugiyama, Tomohiko, Sugino, TakashiVolume:
11
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(01)00593-3
Date:
March, 2002
File:
PDF, 520 KB
english, 2002