The comparison between Ta2O5 and Ti-doped Ta2O5 dielectrics

The comparison between Ta2O5 and Ti-doped Ta2O5 dielectrics

Kao, Chyuan Haur, Lai, Pei Lun, Wang, Hsin Yuan
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Volume:
231
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2012.04.045
Date:
September, 2013
File:
PDF, 1.08 MB
english, 2013
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