On the growth process of hydrogenated amorphous carbon...

Diamond and Related Materials 1993 / 3 Vol. 2; Iss. 2-4

On the growth process of hydrogenated amorphous carbon films on silicon

López, F., Garcia-Cuenca, M.V., Serra, C., Morenza, J.L.
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Volume:
2
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(93)90058-A
Date:
March, 1993
File:
PDF, 325 KB
english, 1993
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