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Post-processing and performance analysis of BEOL integrated MEMS pressure sensor capacitors in 8-metal 130nm CMOS
Sundararajan, Ananiah Durai, Rezaul Hasan, S.M.Volume:
119
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.02.035
Date:
May, 2014
File:
PDF, 1.51 MB
english, 2014