Characterisation of nitrogen modified diamond-like carbon...

Characterisation of nitrogen modified diamond-like carbon films deposited by radio-frequency plasma enhanced chemical vapour deposition

Dorner-Reisel, A., Kübler, L., Irmer, G., Reisel, G., Schöps, S., Klemm, V., Müller, E.
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Volume:
14
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2004.12.014
Date:
March, 2005
File:
PDF, 212 KB
english, 2005
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