Radiation heat savings in polysilicon production:...

Journal of Crystal Growth 2013 / 7 Vol. 374

Radiation heat savings in polysilicon production: Validation of results through a CVD laboratory prototype

Ramos, A., del Cañizo, C., Valdehita, J., Zamorano, J.C., Luque, A.
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Volume:
374
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2013.03.043
Date:
July, 2013
File:
PDF, 617 KB
english, 2013
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