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Bias enhanced nucleation of diamond on Si(100) in a vertical straight hot filament CVD
Makris, Th. Dikonimos, Giorgi, R., Lisi, N., Pilloni, L., Salernitano, E.Volume:
14
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2005.01.015
Date:
March, 2005
File:
PDF, 227 KB
english, 2005