Mechanical assessment of suspended ALD thin films by bulge...

Acta Materialia 2014 / 03 Vol. 66

Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques

Berdova, Maria, Ylitalo, Tuomo, Kassamakov, Ivan, Heino, Jouni, Törmä, Pekka T., Kilpi, Lauri, Ronkainen, Helena, Koskinen, Jari, Hæggström, Edward, Franssila, Sami
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Volume:
66
Language:
english
Journal:
Acta Materialia
DOI:
10.1016/j.actamat.2013.11.024
Date:
March, 2014
File:
PDF, 1.04 MB
english, 2014
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