![](/img/cover-not-exists.png)
Effects of radio-frequency power on the properties of carbon thin films prepared by thermal chemical vapor deposition enhanced with remote inductively-coupled-plasma using acetylene/nitrogen mixtures
Lai, Liang-Hsun, Wu, Kuan-Chang, Shiue, Sham-TsongVolume:
570
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.02.108
Date:
November, 2014
File:
PDF, 1.12 MB
english, 2014