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Properties of SiAlO2N protective coatings on surface acoustic wave devices
Sturtevant, Blake T., da Cunha, Mauricio Pereira, Lad, Robert J.Volume:
534
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.02.062
Date:
May, 2013
File:
PDF, 664 KB
english, 2013