Modification of (111) and (100) silicon in atmospheric...

Applied Surface Science 2014 / 09 Vol. 312

Modification of (111) and (100) silicon in atmospheric pressure plasma

Skácelová, Dana, Stupavská, Monika, Sťahel, Pavel, Černák, Mirko
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Volume:
312
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.04.196
Date:
September, 2014
File:
PDF, 1.01 MB
english, 2014
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