Ultralow temperature ramping rate of LT to HT for the growth of high quality Ge epilayer on Si (100) by RPCVD
Chen, Da, Xue, Zhongying, Wei, Xing, Wang, Gang, Ye, Lin, Zhang, Miao, Wang, Dewang, Liu, SuVolume:
299
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.01.147
Date:
April, 2014
File:
PDF, 1.56 MB
english, 2014