Filling performance and electrical characteristics of Al2O3...

Thin Solid Films 2014 / 04 Vol. 556

Filling performance and electrical characteristics of Al2O3 films deposited by atomic layer deposition for through-silicon via applications

Choi, Kyeong-Keun, Kee, Jong, Kim, Si-Hong, Park, Myung-Soo, Park, Chan-Gyung, Kim, Deok-kee
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
556
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.01.081
Date:
April, 2014
File:
PDF, 1.20 MB
english, 2014
Conversion to is in progress
Conversion to is failed