60keV Ar+-ion induced pattern formation on Si surface: Roles of sputter erosion and atomic redistribution
Garg, S.K., Datta, D.P., Kumar, M., Kanjilal, D., Som, T.Volume:
310
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.03.115
Date:
August, 2014
File:
PDF, 2.20 MB
english, 2014