Methods of simulating thin film deposition using spray...

Microelectronic Engineering 2014 / 04 Vol. 117

Methods of simulating thin film deposition using spray pyrolysis techniques

Filipovic, Lado, Selberherr, Siegfried, Mutinati, Giorgio C., Brunet, Elise, Steinhauer, Stephan, Köck, Anton, Teva, Jordi, Kraft, Jochen, Siegert, Jörg, Schrank, Franz
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Volume:
117
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.12.025
Date:
April, 2014
File:
PDF, 3.62 MB
english, 2014
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