Zirconium nitride polycrystalline films grown on Si (111)...

Materials Letters 2014 / 06 Vol. 125

Zirconium nitride polycrystalline films grown on Si (111) substrates by metal organic chemical vapor deposition

Jin, Joo, Ko, Kang Bok, Song, Hyoun suk, Cuong, Tran Viet, Hong, Chang-Hee
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Volume:
125
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2014.03.112
Date:
June, 2014
File:
PDF, 4.85 MB
english, 2014
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