Damage of Cr film by oxygen plasma

Applied Surface Science 2014 / 05 Vol. 301

Damage of Cr film by oxygen plasma

Wei, Weiwei, Zhu, Yinfang, Yang, Jinling, Yang, Fuhua
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Volume:
301
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.02.120
Date:
May, 2014
File:
PDF, 1.54 MB
english, 2014
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