Ion beam deposition of amorphous hydrogenated carbon films...

Diamond and Related Materials 2011 / 5 Vol. 20; Iss. 5-6

Ion beam deposition of amorphous hydrogenated carbon films on amorphous silicon interlayer: Experiment and simulation

Ibenskas, A., Galdikas, A., Meškinis, Š., Andrulevičius, M., Tamulevičius, S.
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Volume:
20
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2011.03.014
Date:
May, 2011
File:
PDF, 1023 KB
english, 2011
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