Highly linear and large spring deflection characteristics...

Microelectronic Engineering 2014 / 05 Vol. 119

Highly linear and large spring deflection characteristics of a Quasi-Concertina MEMS device

Grech, David, Kiang, Kian S., Zekonyte, Jurgita, Stolz, Martin, Wood, Robert J.K., Chong, Harold M.H.
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Volume:
119
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.02.016
Date:
May, 2014
File:
PDF, 782 KB
english, 2014
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