Optimization of uniaxial stress for high electron mobility...

Solid-State Electronics 2014 / 04 Vol. 94

Optimization of uniaxial stress for high electron mobility on biaxially-strained n-MOSFETs

Sun, Wookyung, Shin, Hyungsoon
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Volume:
94
Language:
english
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2014.01.005
Date:
April, 2014
File:
PDF, 786 KB
english, 2014
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