Thermal decomposition of tetrabromosilane and deposition of...

Materials Science in Semiconductor Processing 2014 / 07 Vol. 23

Thermal decomposition of tetrabromosilane and deposition of crystalline silicon

Nakayama, Masaharu, Miyamoto, Seiji, Ogawa, Takuro, Osae, Shogo, Tomono, Kazuaki, Sumimoto, Michinori, Sakata, Yoshihisa, Komatsu, Ryuichi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
23
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2014.02.045
Date:
July, 2014
File:
PDF, 1.04 MB
english, 2014
Conversion to is in progress
Conversion to is failed