Experimental study of surface generation and force modeling...

International Journal of Machine Tools and Manufacture 2014 / 2 Vol. 77

Experimental study of surface generation and force modeling in micro-grinding of single crystal silicon considering crystallographic effects

Cheng, J., Gong, Y.D.
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Volume:
77
Language:
english
Journal:
International Journal of Machine Tools and Manufacture
DOI:
10.1016/j.ijmachtools.2013.10.003
Date:
February, 2014
File:
PDF, 10.52 MB
english, 2014
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