Al-doped ZnO films deposited on a slightly reduced buffer...

Thin Solid Films 2014 / 03 Vol. 555

Al-doped ZnO films deposited on a slightly reduced buffer layer by reactive dc unbalanced magnetron sputtering

Kusayanagi, Minehide, Uchida, Azusa, Oka, Nobuto, Jia, Junjun, Nakamura, Shin-ichi, Shigesato, Yuzo
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Volume:
555
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.10.153
Date:
March, 2014
File:
PDF, 1.09 MB
english, 2014
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