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Conducting Nb-doped TiO2 thin films fabricated with an atomic layer deposition technique
Niemelä, Janne-Petteri, Yamauchi, Hisao, Karppinen, MaaritVolume:
551
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.11.043
Date:
January, 2014
File:
PDF, 529 KB
english, 2014