Evaluation of subsurface damage in GaN substrate induced by...

Applied Surface Science 2014 / 02 Vol. 292

Evaluation of subsurface damage in GaN substrate induced by mechanical polishing with diamond abrasives

Aida, Hideo, Takeda, Hidetoshi, Kim, Seong-Woo, Aota, Natsuko, Koyama, Koji, Yamazaki, Tsutomu, Doi, Toshiro
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Volume:
292
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.12.005
Date:
February, 2014
File:
PDF, 1.52 MB
english, 2014
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