Titanium macroparticles density decreasing on the sample,...

Titanium macroparticles density decreasing on the sample, immersed in plasma, at repetitively pulsed biasing

Sivin, D.O., Ryabchikov, A.I., Bumagina, A.I., Tupikova, O.S., Daneikina, N.V.
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Volume:
310
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.03.128
Date:
August, 2014
File:
PDF, 1.28 MB
english, 2014
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