![](/img/cover-not-exists.png)
Titanium macroparticles density decreasing on the sample, immersed in plasma, at repetitively pulsed biasing
Sivin, D.O., Ryabchikov, A.I., Bumagina, A.I., Tupikova, O.S., Daneikina, N.V.Volume:
310
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.03.128
Date:
August, 2014
File:
PDF, 1.28 MB
english, 2014