Sheet resistance of alumina ceramic after high energy...

Applied Surface Science 2014 / 08 Vol. 310

Sheet resistance of alumina ceramic after high energy implantation of tantalum ions

Savkin, Konstantin P., Bugaev, Alexey S., Nikolaev, Alexey G., Oks, Efim M., Shandrikov, Maxim V., Yushkov, Georgy Yu., Tyunkov, Andrey V., Savruk, Elena V.
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Volume:
310
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.03.080
Date:
August, 2014
File:
PDF, 840 KB
english, 2014
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