Patterning of oxide-hardened gold black by photolithography and metal lift-off
Panjwani, Deep, Yesiltas, Mehmet, Nath, Janardan, Maukonen, D.E., Rezadad, Imen, Smith, Evan M., Peale, R.E., Hirschmugl, Carol, Sedlmair, Julia, Wehlitz, Ralf, Unger, Miriam, Boreman, GlennVolume:
62
Language:
english
Journal:
Infrared Physics & Technology
DOI:
10.1016/j.infrared.2013.11.005
Date:
January, 2014
File:
PDF, 1.60 MB
english, 2014
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